| Issue |
MATEC Web of Conferences
Volume 8, 2013
Progress in Ultrafast Laser Modifications of Materials
|
|
|---|---|---|
| Article Number | 05003 | |
| Number of page(s) | 2 | |
| Section | Application in optofluidics and in microfabrication | |
| DOI | https://doi.org/10.1051/matecconf/20130805003 | |
| Published online | 18 November 2013 | |
Digital photonic production of 3D micro fluidics in glass by high speed micro scanner
1 Lehrstuhl für Lasertechnik, RWTH Aachen University, Steinbachstraße 15, 52074, Aachen Germany
2 LightFab (in the course of incorporation), Steinbachstraße 15, 52074, Aachen Germany
* e-mail: jens.gottmann@llt.rwth-aachen.de
Digital photonic production of 3D microfluidic devices and assembled micro mechanicsinside fused silica glass is carried out using In-volume Selective Laser-induced Etching (ISLE).From CAD data of digital 3D objects the trajectories of the laser focus are automatically generated. The CAM software has been developed controlling different fs- and ps-lasers, the beam deflection systems and the translation stages to produce the structures automatically.
© Owned by the authors, published by EDP Sciences, 2013
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 2.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.