| Issue |
MATEC Web of Conferences
Volume 8, 2013
Progress in Ultrafast Laser Modifications of Materials
|
|
|---|---|---|
| Article Number | 05002 | |
| Number of page(s) | 2 | |
| Section | Application in optofluidics and in microfabrication | |
| DOI | https://doi.org/10.1051/matecconf/20130805002 | |
| Published online | 18 November 2013 | |
Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass
1 State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai, 201800, China
2 Laser Technology Laboratory, RIKEN - Advanced Science Institute, Hirosawa 2-1, Wako, Saitama 351-0198, Japan
* e-mail: ya.cheng@siom.ac.cn
In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of ~40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value.
© Owned by the authors, published by EDP Sciences, 2013
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 2.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.